Supply, Delivery, Installation and Commissioning of a Physical Vapour Deposition (PVD) Thin Film Deposition Cluster

Type of document: Contract Notice
Country: United Kingdom

1. Title: SUPPLY, DELIVERY, INSTALLATION AND COMMISSIONING OF A PHYSICAL VAPOUR DEPOSITION (PVD) THIN FILM DEPOSITION CLUSTER
2. Awarding Authority: Queen’s University Belfast, GB. Web: (Emmett McCann)
3. Contract type: Supply contract
4. Description: The Awarding Authority seeks to engage with providers of Thin Film Deposition Cluster Tools for the UKRI Smart Nano NI Project activity being delivered by Queen’s.
At present we have a technical requirement for an instrument that includes;
1. A wafer handling system/robot (150mm or 200mm) and load-lock that can provide to a multiple of process chambers (options for single wafer or cassette loading).
2. A Physical Vapour Deposition (PVD) process module 1 – with up to eight (8) sources capable of coverage of 150 mm wafer with high uniformity.
3. A PVD process module 2 – with up to six (6) sources capable of coverage of 150 mm wafer with high uniformity.
4. An Atomic layer Deposition (ALD) module for oxide deposition capable of coverage of 150 mm wafers with high uniformity.
5. A glove-box / transfer-module for the removal/packaging, under controlled conditions, for 150mm wafers.
Smart Nano NI
Smart Nano NI is a Northern Ireland consortium led by Seagate Technology, Yelo Ltd, Cirdan Imaging Ltd, Causeway Sensors Ltd, Analytics Engines, Digital Catapult NI, Ulster University and Queen’s collaborating to develop game-changing advanced prototyping and smart manufacturing methods to deliver new photonic based technologies. The consortium shares a niche capability around nano manufacturing and world-leading knowledge in photonics. The consortium has been awarded £42.4m UK Research and Innovation’s Strength in Places Fund. The total project value including leveraged funding from other sources is £63.9m. Our collaboration is aimed at driving self-sustaining local industry and economic growth through research and innovation.
5. CPV Code(s): 38000000, 42000000, 42997300, 38400000, 38900000, 51000000
6. NUTS code(s): UKN, UKN0, UKN06
7. Main site or location of works, main place of delivery or main place of performance: Northern Ireland, Northern Ireland, Belfast.
8. Reference attributed by awarding authority: Reference : QUB/2306/22 Market Engagement
9. Estimated value of requirement: Not provided.
10. Date documents can be requested until 23.9.2022 (16:00).
11. Address to which they must be sent: For further information on the above contract please visit Web:
12. Other information: TKR-2022825-EX-1871632